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PSM-4K Series

PSM-4K Series

PSM-4K series cryogenic probe station is a closed-cycle cryogenic probe station, compact and low vibration design, can provide a <5K-350K high and low temperature vacuum test environment for semiconductor chip electrical parameter testing.

PSM-4K Series Overview

The 4K closed-loop low-temperature probe station plays a crucial role in scientific research and technological development. It can perform various non-destructive physical and electrical performance tests on samples at low temperatures, helping researchers gain a deeper understanding of the various physical and electrical properties of materials or devices, and providing important data support for the development and application of new materials.
The PSM-4K series low-temperature probe station is a high-performance closed-loop low-temperature probe station. Its compact and low vibration design provides a high and low temperature vacuum testing environment of<5K-350K for electrical parameter testing of semiconductor chips. Adopting closed-loop refrigeration, no liquid helium consumption is required, with a temperature of 4.5K.


Feature
Adopting closed-loop refrigeration, no liquid helium consumption is required, with a temperature of 4.5K.
The displacement adjustment of the probe arm is operated outside the vacuum chamber, allowing for switching between different devices on the sample for testing without damaging the vacuum.
Unique probe arm X-Y-Z-R four-dimensional adjustment, capable of testing 4-inch samples.
The material of the vacuum chamber is aluminum, which can effectively reduce external electromagnetic interference, improve the accuracy and stability of testing.
The probe arm adopts a three coaxial connector with good leakage performance, and the measured leakage current is less than 100fA@ 1V@4.5K-350K.
The testing temperature range is wide, supporting continuous temperature changes from 4.5K to 350K.
The uniquely designed flexible probe is mounted on a copper spring to avoid damage to the sample or electrode caused by excessive force during the needle insertion process.


Test data

Leakage current test data:

Temperature curve:

PSM-4K Series Technical Parameter

Parameters and indicators:

PSM-4K Series Basic Configuration

Semiconductor
IC
Wafer

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