HSMC-10
The HSMC-10 Multi-Channel Hall Test System provides a magnetising environment for multi-electrode cylindrical ingots, D-type ingots and large wafers.
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HSMC-10 Overview
The HSMC-10 Multi-Channel Hall Test System is capable of providing a demagnetised environment for multi-electrode cylindrical ingots, D-type ingots and large wafers. The system has a 77K liquid nitrogen single-point option that provides samples to complete Hall effect measurements at a low temperature of 77K. With the Hall tester, it can accurately measure the electrical properties of low mobility materials can be used in electromagnetic field, liquid nitrogen cryogenic environment (77K), a variety of types of samples for rapid automated testing, in order to obtain the Hall parameters of the samples, including the resistivity of the samples to be tested, the Hall voltage, the Hall coefficient, the carrier concentration, the Hall mobility and the type of carrier, etc., to fill the traditional Hall test instrument can only measure the preparation of the sample The Hall parameters of the sample to be tested are obtained.
features:
- With industry-advanced fast Hall effect test function and data analysis function, greatly reducing the measurement time;
- Matrix switch to achieve free switching and selection between test electrodes, suitable for multi-electrode samples;
- Customisable solenoid can achieve large magnetic field uniform area, suitable for large samples;
- With 24 electrodes automatic selection, switching test and data analysis function;
- With 0.1T ~ 1T wide range of magnetic field adjustment interval, fast zero magnetic field control function;
- With automatic injection function, can support up to 1kg to be tested sample automatic injection;
- With a wealth of sample test support options, can measure cylindrical ingots, D-type ingots, wafers (2-inch, 4-inch and 6-inch) and other samples of various shapes and sizes;
- With data acquisition, collation, analysis and output functions, as well as report customisation and export functions;
- System scalability, upgraded to support up to 32 electrode automatic switching test.
- Testing temperature: room temperature or 77K liquid nitrogen low temperature;
HSMC-10 Technical Parameter
Parameters and indicators：
| Measurement parameters |
|
| Dimensions of the sample to be tested |
Supports 6 inches or larger, compatible with 4 inches and 2 inches |
| Mobility |
0.01~1×106cm2/Vs |
| Standard resistance measurement range |
10mΩ ~ 10MΩ |
| Low-temperature zone | 77K |
| Minimum R2 of Hall test |
0.9999 |
| Matrix switch parameters |
|
| Switch type |
EMR |
| Passage |
A total of (4 banks ×16CH/Bank) channels: 4 groups, with 1 cut of 16 in each group |
| Switching Time (Typ） |
6ms |
| Switching carrying voltage |
300VDC/250VAC |
| Switch carrying current |
Switching current/continuous current: 1A, pulse current: 6A@100ms |
| Sample type |
|
| Cylindrical crystal ingot |
Cylindrical crystal ingots are cylindrical or quasi-cylindrical in shape, and there can be multiple electrodes on the crystal ingot |
| D-type crystal ingot |
It is obtained by cutting in half along the axis of a cylindrical crystal ingot, and there may be multiple electrodes on the crystal ingot |
| Wafer |
2-inch, 4-inch and 6-inch samples |
| Electromagnet |
|
| Magnetic field range |
0.1T~1T@50A(Φ300mm polar surface, fixed air gap 75mm center) |
| Magnetic field step size | 10Gs |
| Magnetic field uniformity |
The central magnetic field of the 75mm air gap is better than that of 1.0T@50A(φ300mm pole surface) for 30 minutes of operation |
| Electromagnet power supply |
|
| Output power |
10 kW @ AC 380 V ±10%(50 ~60 Hz) |
| Output current |
50 A |
| Weight |
30 kg |
| Two-dimensional stepper motor |
|
| Horizontal X stroke |
400mm |
| Vertical Z-stroke (with brake) |
700mm |
| 77K liquid nitrogen single-point system |
|
| Liquid nitrogen volume |
Approximately 3.38 liters |
| Internal dimensions of the thermostat (mm) |
190*54*33 |
| Test temperature |
Room temperature and 77K liquid nitrogen single point |
HSMC-10 Basic Configuration
Semiconductor
IC
Wafer
